摘要 |
PURPOSE:To perform a solar battery substrate having high solar light collecting efficiency by employing a silicon oxide film having 1% or higher of haze rate and many ultrafine projections. CONSTITUTION:A substrate material 9 made of glass or ceramics containing silicon oxide is dipped in a dipping tank made of an outer tank 1, an inner tank 2, water 3, a heater 4, an agitator 5, and a circulating pump 10. The interior 7 of the tank for dipping the material 9 is filled with mixture solution of aqueous silicon oxide saturated water of hydrogen borosilicic acid and aqueous boric acid by 1:1. As a result of dipping, the silicon oxide film having many projections of 300-5,000Angstrom of diameter and 200-3,000Angstrom of height with 1% or higher of haze rate on the surface of the material 9. If the haze rate is 1% or higher, the efficiency due to the multiple reflection and refraction is improved. In case of the above diameter and height in the irregular shape, the productivity is highest, and the crack of the upper layer hardly occurs. |