| 摘要 |
PURPOSE:To realize technique for inspecting the regularity of the surface shape of an object or physical properties appearing on the surface thereof, by performing the characterization of a signal brought about by an irregular state by using correlation operation. CONSTITUTION:A separate regularity pattern 2 having specific regularity is superposed on the part to be inspected of an object 1 to be inspected and the electric signal showing said superposed pattern is formed by a transducer 3. If a TV camera is used as the transducer 3, a video electric signal is obtained. This signal is applied to a correlation operation apparatus 4 and self-correlation or mutual correration operation is performed to obtain a correlation output signal. As a separate signal for obtaining the mutual correlation signal, a signal supply means 5 for delaying the output of the transducer 3 or preparing a reference signal from the outside or the correlation output signal of the correlation operation apparatus in a state stored in memory and supplying the same can be mounted. Because thus obtained correlation output signal well reflects the characteristic of the surface regularity of the object 1 to be inspected having the specific regularity pattern 2 formed thereto, it is detected by a signal detector 6 to be used in inspecting the object 1 to be inspected. |
