| 摘要 |
PURPOSE:To obtain an epitaxial layer having no defect and high quality by disposing a metal cover having a space and made of an outside cover and an inside cover having many holes on the outer periphery of a quartz bell-jar, and blowing air from the holes to the bell-jar. CONSTITUTION:A quartz bell-jar 31 is placed through a packing material 19 on a base 20. A metal cover 34 of double structure having a space therein is provided on the outer periphery of the bell-jar 31. Many holes 38 are formed at an inside cover 37. Fed air is introduced to a vacant portion 34 of the cover 35, and blown from the holes 38 of the cover 37 to the bell-jar 31. The air which received the heat is flowed down, passes between both flanges 32 and 43, exhausted externally from an exhaust tube 45. Thus, an epitaxial layer having no defect and high quality can be obtained. |
