| 摘要 |
PURPOSE:To eliminate the need for the consideration of a danger preventive means due to exothermic heat to supply piping systems for a substasnce showing an exothermic reaction through mixing with sulfuric acid and sulfuric acid, and to wash a substrate by a conventional sheet type automatic treater by separately mounting the supply piping systems. CONSTITUTION:A mixing substance 11 and sulfuric acid 18 are mixed on the surface to be washed 17 of a substrate 16, and an exothermic reaction is generated. When hydrogen peroxide solution is used as the mixing substance 11 at that time, nascent oxygen is also generated by the decomposition of hydrogen peroxide solution, and the surface to be washed 17 is washed by the acceleration of an oxidation reaction by hydrogen peroxide solution, a dehydration reaction by sulfuric acid 18 and these reactions due to exothermic heat. Accordingly, washing action is extremely efficient, and the titled washer need not be heated approximately from the outside because exothermic heat due to a chemical reaction is utilized. The substrate can be washed by a sheet type automatic treater because a known feeder can be used in the supply method. |
