摘要 |
PURPOSE:To obtain the titled element of high reliability by using a material where the crystal grains of Pb-Ind solid solution are arranged in three dimensions with regularity, and an intermetallic compound of a metal selected from among Au, Ag, Mn, Bi, and Ni with Ind is interposed between crystal grains. CONSTITUTION:In a vacuum container 11, the surface of a cooling body 12 is pressed on a substrate 1 via Ind thin plate 13 or thin plate 13 and thermal conductor 13'. For example, at a temperature of 7.7K, Pb 14, Ind 15, and a metal 16 selected from among Au, Ag, Mn, Bi, and Ni are simultaneously evaporated from evaporation sources 17, 18 and from a Knudsen cell 20 having a heater 19, respectively. The crystal grains 3 of a Pb-Ind solution are arranged in three dimensions with regularity by heat annealing treatment, thus forming a thin film where an intermetallic compound 4 of the selected metal 16 with Ind has been interposed between the crystal grains. This enables easy formation of the superconductor thin film having high reliability. |