WAVEGUIDE TYPE SPACE FILTER AND ITS PRODUCTION

摘要

PURPOSE:To improve performance by disposing a light absorbing region using a color center so as to shut off part of the light beam propagating on a plane waveguide in the transverse direction thereof on the plane optical waveguide formed on the surface of a dielectric material. CONSTITUTION:Titanium Ti is laminated by using a sputtering method, etc. over the entire ground surface of a dielectric material 101 then titanium is thermally diffused to form a plane optical waveguide 102. Transition metallic ion is thereafter implanted by 500keV-2MeV energy to a waveguide type space filter region by using an ion implanting device, etc. A plane optical waveguide region 104 and a waveguide type space filter region 103 are thus obtd.