METHOD AND DEVICE FOR ANALYZING SURFACE OF MOVING MATERIAL

摘要

PURPOSE:To enable measurement of a characteristic X-ray having >=0.25nm wavelength by providing a fluorescent X-ray analyzing device which contains an X-ray source and a detector for the characteristic X-ray and is evacuated internally to a vacuum or is substd. with He and substituting the air in the space of an X-ray passage with He. CONSTITUTION:The body part of a fluorescent X-ray analyzing device has an X-ray source 1, a detector 5 for a characteristic X-ray and a housing 7 which contains said source and detector, has an X-ray transmission window 6 and is evacuated to a vacuum or substd. with helium in the inside X-ray passage part. A gas substituting chamber 8 having an opened bottom and a preliminary chamber 9 for gas substitution which encloses the circumference of said chamber and has an open bottom are provided. The detector 5 detects the generated characteristic X-ray and the window 6 isolates the vacuum part or helium substd. part in the housing from the outside. The air in the X-ray passage part is substd. with helium and the characteristic X-ray having >=0.25nm wavelength is made measurable in the stage of performing fluorescent X-ray analysis on the surface of a flat plate-shaped material.