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发明名称
VERFAHREN ZUR AUTOMATISCHEN EINSTELLUNG DES ARBEITSPUNKTES BEI SIGNALVERLAUFSMESSUNGEN MIT KORPUSKULARSTRAHL-MESSGERAETEN
摘要
申请公布号
DE3407041(A1)
申请公布日期
1985.09.05
申请号
DE19843407041
申请日期
1984.02.27
申请人
SIEMENS AG
发明人
FEUERBAUM,HANS-PETER,DR.;FAZEKAS,PETER,DIPL.-ING.
分类号
H01J37/28;G01Q10/06;G01R31/302;G01R31/305;G01T1/28;H01J37/04;H01J37/244;H01J37/26;H01L21/66;(IPC1-7):G01R19/00;G01R31/28
主分类号
H01J37/28
代理机构
代理人
主权项
地址
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