发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要 PURPOSE:To measure the speed of a fundamental cell in an unwired state by a method wherein an oscillation circuit or a delay circuit is provided independently from the logic circuit, whereon a wiring is provided on a master slice, by performing a multistage-connection on a fundamental gate. CONSTITUTION:An inverter 7, a resistor 3, a diode 4 and an N-channel MOSFET 10 are connected as prescribed on an input circuit 31 using a CMOSFET, and the input circuit 31 functions as an inverter. If a circuit 32 is composed of an odd number of NOR circuits 11-13, it is ring-oscillated when the output of the inverter 7 is in low level, and an output is obtained at a terminal 2 through the intermediary of an output circuit 33. When circuits 31-33 are composed of intrinsic logic circuits utilizing the unused elements and terminals, terminals 1 and 2 are in a disconnected state, the output of the inverter 7 is in a high level, and an oscillation circuit is brought to a standstill. The input terminal 1 is maintained at a high level only when the speed tpd of the NOR circuits are measured, and the oscillation output is obtained from the terminal 2. Accordingly, the speed of the NOR circuits can be measured using a frequency indicator without measuring the speed of IC, and the finished condition of the intrinsic logic circuit can also be evaluated.
申请公布号 JPS60170953(A) 申请公布日期 1985.09.04
申请号 JP19840027472 申请日期 1984.02.16
申请人 NIPPON DENKI KK 发明人 FUKUDA TERUMASA
分类号 H01L21/822;H01L21/82;H01L21/8234;H01L27/04;H01L27/118 主分类号 H01L21/822
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