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发明名称
ETCHING METHOD
摘要
申请公布号
JPS60170940(A)
申请公布日期
1985.09.04
申请号
JP19840263160
申请日期
1984.12.14
申请人
INTERN BUSINESS MACHINES CORP
发明人
RII CHIEN;HENRI ANTOWAAN KUURII;HAARAN RICHIYAADOSON SEIMAA
分类号
H01L21/302;C23F4/00;H01J37/32;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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