| 摘要 |
PURPOSE:To take a measurement at a high speed and inspect an internal defect with high accuracy by decreasing greatly the number of projections to be collected. CONSTITUTION:This device has a standard data collection mode and a measurement mode, and when data on a reconstituted image in standard data collection mode are collected, a standard product which has neither an internal defect nor size deviation is used as a sample to be inspected. Projection data is stored in memory 22 previously, and consequently data except projection data in the projection direction in the measurement mode is extracted and the projection data in the projection direction in side measurement mode is collected to reconstitute an image by using this data and said extracted data. Consequently, the composite image is composed principally of the projection data obtained from the standard sample while a small number of data obtained in the measurement data are inserted, and if there is a defect different from the standard sample in the inspected body, it presence is known at a look. |
