| 摘要 |
PURPOSE:To detect the deterioration of optical members constituting a laser device by a method wherein a detecting mechanism is provided, outside the path of the laser beam, constituted of a light source to throw light upon the optical members and a means to detect scattered reflection. CONSTITUTION:Deterioration of a partially reflective mirror 2 for a laser beam 3, 4 is principally attributable to faults in coatings 21, 22. With such faults being scarcely uniform in directivity, the scattering of light is related largely as the cause of the faults. The light emitted by a light source 30 is scattered due to faults in the coatings 21, 22. The scattered light is detected by a detecting means 31 installed in the vicinity of the light source 30. The detecting means 31 is connected to an alarm means 40 outputting a warning upon detecting a value exceeding a prescribed level. The alarming means 40 thus annunciates any deterioration of faults in the mirror 2. |
