| 发明名称 |
METHOD AND APPARATUS FOR DEPOSITING CONDUCTING OXIDE ON A SUBSTRATE |
| 摘要 |
<p>There is described a method and an apparatus for depositing oxide, such as zinc oxide, on a substrate by R.F. magnetron sputtering. The oxide deposit is "switched" from a non-conducting to a highly conducting material by a second discharge caused by a voltage applied to a screen grid immediately in front of the substrate, or is rendered conducting by a heating step.</p> |
| 申请公布号 |
CA1192860(A) |
申请公布日期 |
1985.09.03 |
| 申请号 |
CA19840461115 |
申请日期 |
1984.08.15 |
| 申请人 |
MAJESTY (HER) IN RIGHT OF CANADA AS REPRESENTED BY THE NATIONAL R |
发明人 |
WEBB, JAMES B.;WILLIAMS, DIGBY F.;BUCHANAN, MARGARET A. |
| 分类号 |
C23C14/34;(IPC1-7):C23C14/34 |
主分类号 |
C23C14/34 |
| 代理机构 |
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代理人 |
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