VAPOR-PHASE REACTION APPARATUS AND MANUFACTURE OF VAPOR-PHASE REACTION FILM

摘要

PURPOSE:To prevent the backflow of atmosphere from an exhaust system. by interposing a composite molecular pump or a turbo molecular pump (TP) of a continuous exhaust system between a reaction vessel and a roughing vacuum pump (RP) such as a rotary pump of a hydraulic rotary system. CONSTITUTION:A preparatory chamber 100 is made vacuum by RP35 through TP86. With the number of revolution of TP86 made variable, continuous rotation is conducted with the reduced number of revolution even when a vessel is under the atmospheric pressure, thus preventing the backflow of an oil component from RP35 and the pollution of the surface of a substrate by the oil component. With a gate valve 44 for separation opened, a substrate 1 held by a jig 38 is transferred into a reaction vessel 101 which is made vacuum beforehand by TP87. The degree of vacuum in the reaction vessel 101 is controlled by a pressure regulation valve 72 with the number of revolution of TP87 reduced. Since TP87 of a continuous exhaust system is operated, the backward diffusion of polymerized oil in RP36 and the backflow of atmosphere impregnated in the oil can be prevented.