| 摘要 |
PURPOSE:To obtain a sol-like substance supply apparatus preventing the entailing of the mist to an exhaust system and having good collection efficiency, by providing a jet nozzle to the leading end part of a sol-like substance supply pipe and enclosing said jet nozzle by a pipe member opened at the leading end part thereof. CONSTITUTION:A jet nozzle 8 is provided to the leading end part of a liquid supply pipe 7 for supplying a sol-like substance 10 and enclosed by a pipe member 9 opened at the leading end part thereof. As a result, the sol-like substance is injected from the jet nozzle 8 and flowed down as a flowable liquid film and the entailing of mist to an exhaust system is prevented to eliminate the requirement of a collection apparatus to be arranged to the exhaust system while no adverse effect is exerted upon a vacuum generation apparatus 5. In addition, liquid droplets injected by the jet nozzle are perfectly collected by the pipe member 9 and collection efficiency is excellent. |
