| 摘要 |
PURPOSE:To improve sealing characteristics, by using a glass, whose pour point is 700-800 deg.C and thermal expansion coefficient is 35X10-7-50X10-7 [1/ deg.C], as a glass for bonding and sealing a silicon disc and a metal shell. CONSTITUTION:A silicon disc 3 is fixed on a shell 1 made of Cobal through a glass 2. The shell 1 and the disc 3 are bonded and sealed by the flow of the glass 2. A glass, which has a composition of 54wt% ZnO, 1wt% ZnF2, 31wt% B2O3, 4wt% SiO2, 5wt% Al2O3 and 5wt% P2O5, is melted at 1,200 deg.C as the glass 2. Then a thermal expansion coefficient alpha=45X10<-7> [1/ deg.C] and pour point Tf=750 deg.C are obtained. The thermal expansion coefficient is approximate to that of Cobal, and cracks are not yielded in the glass. |
