| 摘要 |
PURPOSE:To stably succeed photochemical reaction on a substrate over a long time, by providing a reflective mirror in the side opposite to a reaction container of a light source and making the transmitted luminous flux density of a transparent window smaller than irradiated luminous flux density onto the substrate. CONSTITUTION:In an apparatus for generating photochemical reaction on a substrate 5 constituted so that reaction gas is introduced into a reaction container 1 having a transparent window 2 and the substrate 5 placed in the reaction container 1 is irradiated with light from the light source 6 in the outside through the transparent window 2, a reflective mirror 8 is provided in the side opposite to the reaction container 1 of the light source 6 and the transmitted luminous flux density of the transparent window 2 is made smaller than irradiated luminous flux density onto the substrate 5. As a result, the accumulation and adhesion of the reaction product to the inner surface of the transparent window 2 is reduced and transparency can be kept and photochemical reaction on the substrate can be stably succeeded over a long time. |
