| 摘要 |
PURPOSE:To prevent corrosion or deformation of an electrically insulative structural material or window material exposed to a plasma atmosphere, by forming the material of a dielectric sintered material which hardly forms a fluorine compound in the plasma atmosphere. CONSTITUTION:Various processes such as formation of an etching pattern, vapor deposition of a film and cleaning are effected in a plasma atmosphere of a fluorine compound gas. An electrically insulative structural material or window material to be exposed to the plasma atmosphere is formed of a dielectric sintered material which hardly forms a fluorine compound in the plasma atmosphere. In such a manner, the structural material is prevented from corrosion or deformation, and therefore dust is prevented from being produced by corrosion.
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