发明名称 POSITION MATCHING SIGNAL PROCESSING DEVICE
摘要 <p>PURPOSE:To offer a position matching signal processing device which can execute a position matching with high accuracy, by selecting a threshold which can be detected with high accuracy. CONSTITUTION:Outputs of the first and the second amplitude discriminating circuits 6, 7 connected to the first and the second amplifiers 3, 4 are connected to a controlling circuit provided with an operating part and a storage part, through a signal synthesizing circuit 8 for extracting selectively only a necessary signal component and synthesizing it. On the other hand, outputs of the first or the second amplifiers 3, 4, which have passed through a switch 5 are provided to an A/D conveter 12 through a low-pass filter 10 and a changeover switch 11, and also sent out to the controlling circuit 9. Also, outputs of the first or the second amplifiers 3, 4 further pass through a switch 13 and the transmitted to a peak holding circuit 14, and connected to the A/D converter 12 through the changeover switch 11. The controlling crcuit 9 stores and calculates a value obtained from the A/D converter 12 and the signal synthesizing circuit 8, also sends out a calculated threshold to the first and the second amplitude discriminating circuits 6, 7, and also transmits a switching instructing signal to the changeover switches 5, 11 and the switch 13.</p>
申请公布号 JPS60168149(A) 申请公布日期 1985.08.31
申请号 JP19840022890 申请日期 1984.02.13
申请人 CANON KK 发明人 SATOU TERUYA;YOMODA MINORU
分类号 H01L21/30;G03F7/20;G03F9/00;G11B15/26;H01L21/027 主分类号 H01L21/30
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