| 摘要 |
PURPOSE:To control the spreading angle of luminous fluxes and to improve the utilizing efficiency and exposing efficiency of luminous fluxes by forming laser light having a short coherence length to plural divergent luminous fluxes by a light integrator and making the diverging origin thereof and a front side focal plane approximately coincident with each other. CONSTITUTION:Laser light 2 of the parallel luminous fluxes from an excimer laser body 1 is made into plural divergent luminous fluxes by a light integrator 4 and the main rays thereof are again made into parallel luminous fluxes by a collimator lens 5. Said fluxes irradiate a surface 3 to be irradiated in the position of the focal plane of the lens 5. The irradiating diameter and spreading angle A of the light on the surface 3 can be controlled to desired sizes by selecting adequately the individual lens diameters of the integrator 4, the diameter over the entire part thereof and the focal length of the lens 5 by which the utilizing efficiency and exposing efficiency of the luminous fluxes are improved. |
