| 摘要 |
PURPOSE:To enhance operability by facilitating the adjustment of the axial direction of a sound wave lens and the scanning surface of a specimen, by knowing the axial direction of the sound wave lens by detecting electrostatic capacities at plural places of the sound wave lens and a specimen table. CONSTITUTION:A plurality of electrode plates 12, which are arranged so as to be capable of detecting the electrostatic capacity between said electrode plates 12 and a specimen table 10, are provided to the periphery of a spherical lens 3. The shapes or attachment accuracies of the electrode plates 12 are prescribed so that all of electrostatic capacities C1-Cn detected from respective electrode plates 12 show almost equal values in such a state that the axial center of the spherical lens 3 is arranged vertically to the surface of the specimen table 10. Therefore, when values of electrostatic capacities detected from the electrodes 12 are not equal, the inclination angle adjusting mechanism (not shown in the drawing) mounted to the attachment tool of the spherical lens 3 is regulated to equalize the electrostatic capacities. As a result, the spherical lens 3 is ideally arranged to a specimen. |
