摘要 |
PURPOSE:To facilitate defective analysis by preparing acceptable/unacceptable data for every memory cell depending upon a test result to be conducted for every memory cell for wiring defects to make mask instruction information of the data. CONSTITUTION:An inspection device decides acceptable/unacceptable for a memory (MUT1) to be measured output signal to a test by an acceptable/unacceptable decision part 14, and stores such a signal as mask command information in a memory cell or memory cell group in a memory cell 10 of a storage 9 corresponding to a memory cell or memory cell group in a memory cell 2 of an MUT 1. Then the device performs a test for other items, an output signal, namely, mask command signal is generated from a prescribed memory cell in the storage 9, which is selected by X and Y counters 5 and 6. Then control is made whether or not to output an MUT1 acceptable/unacceptable decision signal by an AND gates 15 and 16 on which a strobe timing signal is impressed to synchronize this mask command signal with the above MUT1 output. Thus the device is designed to output an acceptable/unacceptable signal holding the mask command signal, as accepted. |