| 摘要 |
PURPOSE:To prevent washing irregularity from occurring at the contacting portion, by constituting portions contacting with thin round-substrates (or thin rectangular-substrates) by rod materials, and by providing with opening and closing means under the washing jig. CONSTITUTION:Thin round-substrates 1 (or thin rectangular-substrates 2) are set between partitioning covers 7 of the washing jig. Each thin round-substrate 1 (or thin rectangular-substrate 2) is held in the washing jig by a stopper 9 which is oppressed in the direction of the arrow 12 by a weight 11, and is washed. Finishing the washing of the thin round-substrate 1 (or the thin rectangular-substrate 2), it falls sequentially by its weight, because the projection of the opening and closing notch 13 pivots the weight 11 in the direction of the arrow 15 by moving in the direction of arrow 14 the notch 13 being indicated by the dotted lines in the figure, and therefore the stopper 9 rotates in the direction of the arrow 15. In this case, if a conveyer, etc. is installed below the washing jig, the thin round- substrates 1 (or the thin rectangular substrates 2) can be took out one by one onto the conveyor. |
