| 摘要 |
A transducer for stress or strain measurement comprises a pair of parallel stretched silicon filaments 12 which vibrate in antiphase in their common plane. The resonant vibrational frequency is determined by the external forces applied to the filaments. The transducer may be employed as a sensor element in an inertial guidance system. The filaments form a double-ended tuning fork structure attached at its roots 13, 14 to a single crystal silicon support 11 having flexible regions 15 by which external forces are applied to the filaments. Piezoelectric layers or electrostrictive pn junctions at the roots 13, 14 establish filament vibration which may then be detected electrically or optically. <IMAGE> |
