| 摘要 |
PURPOSE:To provide backed electrodes opposing at the front and rear surfaces of ceramics base material, lower a resistance by reducing the ceramics base material and connect the front and rear surfaces. CONSTITUTION:When the backed electrodes 4, 4' (5, 5') mainly composed of Al are formed to the opposed regions of front and rear surfaces of semiconductor ceramics base material 1 wherein insulated crystal boundary 11 exists between crystal particles 10 of SrTiO3, the reaction of Al Al2O3 is carried out at the time of baking and the necessary O2 is removed from the insulated region 11 just below the electrodes. The reduced part becomes relatively low resistance region 11' (semiconductor region). According to this constitution, the front and rear surfaces can be electrically connected by partially changing the ceramics substrate to the conductive or semiconductive region, in place of formation of a through hole.
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