摘要 |
PURPOSE:To improve detection sensibility of CA ions by making an electric field for energy analysis into a toroidal electric field while arranging a collision chamber adjacent to the ion incident end surface of the electric field for energy analysis. CONSTITUTION:A sample is ionized at an ion source IS and the ions generated here are subjected to a mass spectrograph in a magnetic field B, while the ions having the specific mass to be determined by the ion acceleration voltage and the intensity of the magnetic field B process into a collision chamber CC for being splitted here colliding with the neutral collision gas molecules, while the splitted ions processed into the electric field E for energy analysis to be subjected to energy analysis. Since the ion having a speed component in the vertical direction to the central ion orbit surface is also given the focusing power by making the electric field E for energy analysis into the toroidal electric field and the collision chamber is arranged nearing the incident end surface of the electric field E for energy analysis, the CA ions having a speed component in the orthogonal direction to the central ion orbit being incident from the collision chamber can be made to efficiently proceed into the electric field for energy analysis. |