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发明名称
ETCHING METHOD
摘要
申请公布号
JPS60165722(A)
申请公布日期
1985.08.28
申请号
JP19840243552
申请日期
1984.11.20
申请人
INTERN BUSINESS MACHINES CORP
发明人
RII CHIEN;GANGADAARA SUWAMI MASADO
分类号
H01L21/302;H01L21/3065;H01L21/3105;H01L21/311
主分类号
H01L21/302
代理机构
代理人
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地址
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