High vacuum deposition processes employing a continuous pnictide delivery system.

摘要

A film deposition apparatus characterised in that it comprises: (A) a reservoir containing heated pnictide; (B) means for passing an inert gas therethrough; (C) a high vacuum film deposition chamber; and (D) means for supplying the said inert gas carrying the said pnictide as a vapour species after passing through the said pnictide to the said deposition chamber is disclosed. A high vacuum deposition process characterised in that it comprises passing an inert gas through heated pnictide and supplying the product gas to a vacuum chamber maintained at a pressure below 10<-><3> Torr (1.33 x 10<-><1> Pa) is also disclosed. Referring to the accompanying illustrative diagram, the present apparatus may comprise reservoir (30), means for passing inert gas therethrough (28), deposition chamber (22) and supply means (60). Films of pnictide, polypnictide and other pnictide compounds may be deposited for semiconductor and other applications including insulation and passivation, particularly on III-V semiconductors. The present invention represents an advance over the prior art.