| 摘要 |
PURPOSE:To reduce the size and weight of the titled device, by a construction wherein a system including a substrate-feeding system and a substrate surface- treating system is fixed to a base in a vacuum tank by fixing jigs through two plates supporting it, and the plates are provided separately from walls of the vacuum tank. CONSTITUTION:The system including a substrate pay away or take-up shaft 12, free rollers, an expander, a vapor deposition roller 16 and the substrate surface- treating system is fixed to the bases 6, 7 by bolts 10, 11 through two plates 8, 9 which support the system and are provided independently from the walls of the vacuum tank 1. |
