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发明名称
摘要
申请公布号
JPS60128352(U)
申请公布日期
1985.08.28
申请号
JP19840014159U
申请日期
1984.02.06
申请人
发明人
分类号
G03F1/00;G03F1/54;G03F1/60;H01L21/027;H01L21/30
主分类号
G03F1/00
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代理人
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