发明名称 Apparatus and method for plasma treatment of resin material.
摘要 <p>A method for applying surface plasma-treatment to articles of resin material in a reaction chamber by irradiating the surfaces of the articles with a microwave discharge plasma within the reaction chamber, comprising injection the plasma form a plurality of positions located adjacently to the inner wall of the reaction chamber, and injecting the plasma from each injecting position in a certain speading angle along the direction of injection. An apparatus for plasma treatment, capable of plasma-treating articles of resin material by irradiating the surfaces of the articles with a microwave discharge plasma within a vacuum reaction chamber (1) which is in the form of a circular cylinder of 1000 mm or more in diameter, the form of a square prism of 1000 mm or more in the length of a side or an analogous form, comprising a plurality of plasma introducing ports (9, 10, 11) formed in the wall of the reaction chamber at optional positions thereon; and a glass pipe (12, 13, 14) connected to each plasma introducing port for injecting the plasma into the reaction chamber in a certain spreading angle along the direction of injection.</p>
申请公布号 EP0152511(A1) 申请公布日期 1985.08.28
申请号 EP19840101938 申请日期 1984.02.23
申请人 TOYOTA JIDOSHA KABUSHIKI KAISHA 发明人 FUKUTA, KENJI;KANEKO, TAKAOKI;TAKAHASHI, YOSHINOBU
分类号 B29C59/14;H01J37/32;(IPC1-7):B29C59/14 主分类号 B29C59/14
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