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发明名称
VERFAHREN ZUM NACHWEIS VON INNEREN BRUCHFLAECHEN IN HALBLEITERCHIPS
摘要
申请公布号
DD226694(A1)
申请公布日期
1985.08.28
申请号
DD19840266909
申请日期
1984.09.03
申请人
VEB HALBLEITERWERK,FRANKFURT (ODER),,,DD
发明人
BAEHR,RENATE,DD;BLECHSCHMIED,EDELTRAUD,DD;FECHNER,MONIKA,DD
分类号
G01N1/32;H01L21/306;H01L21/66;(IPC1-7):H01L21/306
主分类号
G01N1/32
代理机构
代理人
主权项
地址
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