发明名称 Process for preparing single crystal
摘要 A process for preparing a single crystal comprising drawing up a single crystal by the Czochralski process and cooling it at a temperature not lower than 600 DEG C. at a reduced pressure or in vacuo, by which a single crystal having a dislocation density of 1.5x104 cm2 or less is prepared.
申请公布号 US4537652(A) 申请公布日期 1985.08.27
申请号 US19840617563 申请日期 1984.06.05
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD.;NIPPON TELEGRAPH & TELEPHONE PUBLIC CORP. 发明人 KAWASAKI, AKIHISA;TADA, KOHJI;KOTANI, TOSHIHIRO;MIYAZAWA, SHINTARO
分类号 C30B15/00;C30B15/14;C30B27/02;H01L21/208;(IPC1-7):C30B15/00 主分类号 C30B15/00
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