发明名称 |
SYNTHESIS OF SILICON NITRIDE |
摘要 |
<p>A process for synthesizing .alpha.-silicon nitride by reacting a silicon halide and ammonia at a high temperature, in which at least while the reaction product is amorphous, hydrogen and chlorine are burned in a reaction zone where the silicon halide and ammonia, are reacted, and the reaction of said reactants is effected by the heat of combustion obtained.</p> |
申请公布号 |
CA1192377(A) |
申请公布日期 |
1985.08.27 |
申请号 |
CA19820400142 |
申请日期 |
1982.03.31 |
申请人 |
ASAHI GLASS COMPANY LTD. |
发明人 |
SATO, KIMIHIKO;TERASE, KUNIHIKO;KIJIMUTA, HITOSHI |
分类号 |
C01B21/068;(IPC1-7):C01B21/068 |
主分类号 |
C01B21/068 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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