| 摘要 |
PURPOSE:To observe a light shielding pattern of a low reflection factor with good contrast and resolution, by using an incident illuminating microscope, and placing a reflector plate which consists of that which has arranged densely minute spherical glass on a plane, etc. and reflects light in the incident direction, in the lower part of a mask to be observed. CONSTITUTION:Incident illuminating light fills a part between paths 19, 20 of light, and it is made incident so as to form a focus roughly in an observed part of a mask 14. As for the part which has hit against a light shielding pattern 13, the greater part is absorbed, a light which has passed through a transmitting part of the mask 14 hits against a reflector plate 15, and the greater part of the light is refracted and reflected by minute spherical glass of the inside. Subsequently, it is reflected in roughly the incident direction like paths 21, 22 of light, forms a focus roughly in the observed part of the mask 14 again, advances further and goes into an objective lens 11. To an observer, the light shielding pattern 13 is seen clearly in black in a bright background, and a focused point position of a microscope becomes clear. |
