发明名称 |
Method for making semiconductor device |
摘要 |
In making a vertical bipolar transistors, after forming by diffusion process a region to become inactive base region an oxide film is selectively formed on the region, thereafter an ion implantation is carried out to produce regions which become the active base region and emitter region by using the oxide film; thereby such a configuration is formed so that defect part (108) induced at the time of the ion implantation is confined in the emitter region, thereby minimizing the leakage current at the PN junction, and hence assuring production of high performance and high reliability semiconductor devices; further, a high integration is attained by adopting self-alignment in forming emitter contact.
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申请公布号 |
US4536950(A) |
申请公布日期 |
1985.08.27 |
申请号 |
US19840578036 |
申请日期 |
1984.02.08 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
SADAMATSU, HIDEAKI;INOUE, MICHIHIRO;KANDA, AKIHIRO;MATSUZAWA, AKIRA |
分类号 |
H01L21/033;H01L21/265;H01L21/331;H01L21/762;(IPC1-7):H01L21/225 |
主分类号 |
H01L21/033 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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