发明名称 |
CMOS process for fabricating integrated circuits, particularly dynamic memory cells with storage capacitors |
摘要 |
A CMOS process is described which is particularly suited for forming dynamic memory cells. The cells are formed in an n-well and a single plate member formed from a first layer of polysilicon is used for the entire array. Unique etching of the first polysilicon layer prevents stringers from occurring when the second layer of polysilicon is deposited. A tri-layer dielectric is used for the capacitors in the array. Novel "rear-end" processing is disclosed using a phosphorus doped glass.
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申请公布号 |
US4536947(A) |
申请公布日期 |
1985.08.27 |
申请号 |
US19840627061 |
申请日期 |
1984.07.02 |
申请人 |
INTEL CORPORATION |
发明人 |
BOHR, MARK T.;YU, KEN K.;YAU, LEO D.;GARG, SHYAM G. |
分类号 |
H01L21/8238;H01L21/8242;H01L27/108;(IPC1-7):H01L21/306;H01L21/31 |
主分类号 |
H01L21/8238 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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