发明名称 Photoresist compositions and method
摘要 Water soluble blends are provided of alkanolacrylamide, water soluble hydroxyl containing film forming organic oligomer and an effective amount of an onium salt photoinitiator. These photocurable compositions can be used as photoresists.
申请公布号 US4537854(A) 申请公布日期 1985.08.27
申请号 US19830531977 申请日期 1983.09.14
申请人 GENERAL ELECTRIC COMPANY 发明人 CRIVELLO, JAMES V.
分类号 G03F7/004;C08F2/48;G03F7/027;G03F7/029;G03F7/038;H01L21/027;(IPC1-7):G03C1/70 主分类号 G03F7/004
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