| 摘要 |
PURPOSE:To supply laser of constant energy-density to a fixed position of a work by a method wherein laser is blank-emitted until the opening angle theta of laser reaches a steady state, and the work is processed with the laser whose opening angle theta has reached the pormal state. CONSTITUTION:A shutter 4 is provided between an objective lens 2 and the work 3, and photo laser is always emitted from a rod 1. When the opening angle theta of laser is in instability, the laser is blankly emitted by closing the shutter 4; on the other hand, after the opening angle theta reaches the steady state, the laser is used for processing the work 3 by opening the shutter 4. Blank emission of laser at an unstable period in the beginning of laser emission produces stable and constant energy-density kept in stability without variability, and enables the processing of high-quality and high-reliability products without irregularity. Accordingly, the work can be precisely processed by stabilizing the energy density and eliminating the deviation of focal position. |
