| 摘要 |
PURPOSE:To reduce time for a trimming treatment and to increase a trimming speed by bringing the position starting actual trimming after the 2nd resistor more closely to the boundary between the resistor and substrate surface than the start position for trimming in data. CONSTITUTION:The oscillated light of an Nd; YAG laser 1 subjected to Q switch driving is expanded in the beam diameter by a beam expander and is made incident on a galvanometer type beam positioner 3. The optical axis of the laser light is changed by the positioner and is made incident on a condensing lens 4. The exit light of the lens 4 is reflected by a dichroic mirror 5 and is irradiated to a resistor 6 to be trimmed. Probes 7 are connected to both ends of the resistor 6 and the outputs from these probes are conducted to a resistance value-voltage converting circuit 31. The start and stop of the oscillation of the Q switch Nd; YAG laser 1 and the driving of a beam positioner driving circuit 11, a beam positioner control circuit 12, a voltage comparator circuit 42, a voltage change detecting circuit 32 and a counter circuit 33 are controlled by a computer 41. |
