| 摘要 |
PURPOSE:To make a dimension checking work efficient by entering dimension information near a dimension measuring cell pattern of a mask to make it easy to not only find the cell pattern but also read dimensions. CONSTITUTION:A dimension measuring cell pattern 6 is entered on a reticle 5, and number ''3'' as dimension information 7 is entered near this cell pattern 6. Design value ''3'' is patterned with a number 7' near a dimension measuring cell pattern 6' in each pellet 9 on a mask 8 through a lens 10 for reduction. Thus, it is easy to find the cell pattern 6', and it is unnecessary in reading of the design value to collate a design drawing each time, and the dimension checking work is performed efficiently. |
