发明名称 SHUTTER DEVICE
摘要 PURPOSE:To easily control the quantity of transmitted light of light pulses by rotating a disk which has specific opening parts across the optical path of light pulses synchronously with light pulses of pulse oscillation laser light. CONSTITUTION:The rotating shutter disk 1 is provided with light transmission windows 2-4 whose area ratio is, for example, 4:2:1. On the other hand, light 7 from a light emitting diode 6 is made parallel to a shaft 10 and light incident on a photodetecting element 8 through an opening part of the shutter is detected, so that a controller 9 controls the rotation of the rotating shaft 10, therefore, the shutter disk 1 on the basis of the photodetection output. The rotation of the shutter disk 1 is synchronized to the light emission timing of pulses of the laser light 5. Consequently, the quantity of light is adjusted easily and accurately.
申请公布号 JPS60162218(A) 申请公布日期 1985.08.24
申请号 JP19840016158 申请日期 1984.02.02
申请人 CANON KK 发明人 INE HIDEKI
分类号 G02B26/02;G02B26/04;G02B27/10;G03F7/20;H01L21/027;H01L21/30 主分类号 G02B26/02
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