| 摘要 |
PURPOSE:To correspond to even the case when the shape and size of a material to be heated vary easily by separating a heating body, on which the material to be heated is placed, and an electromagnetic induction heating source and bringing the heating body and the heating source to a mutually detachable state. CONSTITUTION:A heating coil 4 (a mica heater) as an electromagnetic induction heating source is supported detachably on a susceptor 1 through support pins 2 and a support plate 3, and a base 6 consisting of ceramics, etc. is supported to a section upper than the heating coil through struts 5. An approximately circular heating body 8 is supported detachably through support pins 7. A wafer 9 as a material to be heated is placed on the heat body 8. The heating body 8 receives electromagnetic induction action by the heating coil 4 and generates heat, and heats a wafer 9 at a desired temperature. When the inside of a device is contaminated, the heating body 8 and the heating coil 4 are removed simply and can be cleaned. |
