| 摘要 |
PURPOSE:To enable to automatically adhere a filter to a solid-state image pickup element by a method wherein the mutual shifting amount between the matching marks of the element and the filter is read out and corrected by the CC TV camera of a microscope and a position readout unit, and both of the matching marks are made to integrally coincide in one body by irradiating with ultraviolet rays. CONSTITUTION:An unworked element 23a on an element feeding table 21a is pushed out on an element feeding conveyor 24a by a ejector (omitted in the diagram) and is carried to the vicinity of an element table 26. After that, the element 23a is wrapped by an element feeding pawl (omitted in the diagram), is transferred on an element mounting jig 25, and the lower surface of the element 23a is vacuum-attracted and fixed on the jig 25. A microscope 45 with a focus detecting unit is made to shift to three points appointed previously on the element 23a by successively driving the X2 and Y2 tables 41 and 42 of a camera table 40 and an automatic focusing operation is performed. The height position of a Z2 table at the time of focusing is read out by a displacement detector 73 and a counter 74, and the respective surface height of the three points is measured. The revolution amount computations of the alpha axis and the alpha axis for making the surface of the element 23a level and the driving amount computations of the alpha axis driving motor and the beta axis driving motor, which correspond to the revolution amount computations, are performed in the CPU of this adhesion device.
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