| 摘要 |
PURPOSE:To stabilize continuous-oscillation starting and intermittent-discharge pulse- oscillation of a laser, by generating auxiliary discharge between anodes and auxiliary electrodes before starting main discharge so that the auxiliary discharge causes the main discharge momentarily. CONSTITUTION:Auxiliary electrodes 9 are the same potential as cathodes 4 before the discharge starting, but a distance between the auxiliary electrodes 9 and anodes 3 is extremely short in comparison with one between the anodes 3 and the cathodes 4 so that the discharge between the auxiliary electrodes and the anodes is done positively for a very short time even at a low voltage. Between the auxiliary electrodes 9 and anodes 3, the discharge current is limited by resistors 10 with a high resistance to become the low-current discharge. Once the discharge has occurred, the potential of the auxiliary electrodes 9 is decreased by the resistors 10 and the main discharge which is induced by the low-current discharge between the auxiliary electrodes 9 and the anodes 3 is done between anodes 3 and cathodes 4. At this time, since an activating gas is caused to flow fast in the directions from the anodes 3 at the sides of the resonance mirrors 1 and 2 to the cathodes 4, gas ions which fill the important role for keeping the glow discharge have a fast moving speed and therefore can exert sufficient impact to the cathodes 4. |
