| 摘要 |
PURPOSE:To obviate mutual interference through a chuck for enabling a precise parallel measurement, by composing a chuck of a plurality of metallic blocks insulated electrically. CONSTITUTION:A wafer chuck 6 is divided into metallic blocks 4 which are electrically insulated. Therefore, IC pellets 2 are substantially prevented from mutual interference, and can be tested precisely. Thus, according to this invention, a plurality of ICs can be stably measured in parallel. |
