| 摘要 |
PURPOSE:To simplify the manufacturing steps by polishing a substrate in the prescribed direction by a polishing material, and forming planar opposite electrodes formed after head treating to generate an electric field in the direction including 1/2 or more of parallel component with respect to the polishing direction. CONSTITUTION:When a glass substrate 1 is polished by an alumina nylon cloth in one direction, grooves 2 of the direction parallel to the polishing direction are formed. When CdS, CdSe or CdS-CdSe sensor film 3 deposited on the substrate is heat treated in cadmium chloride, and crystallized, the crystal is grown along the grooves to obtain particles of the size determined by the pitch of the grooves of the prescribed interval. At least one of Al1O3, SiC is contained in the polishing material, and the number of polishings is 5-30 times. When electrodes 4, 5 are formed to generate an electric field parallel to the polishing direction, the scattering of the carrier is reduced. This is effective if the components of the polishing direction of 1/2 or larger are contained. Thus, the irregularity of the light responding speed can be reduced in a simple step. |
