发明名称 FORFARANDE OCH ANORDNING FOR YTUNDERSOKNING
摘要 Method and apparatus for mass spectral analysis of unknown species of matter present on a surface in extremely low concentrations. A probe beam such as an ion beam, electron beam or laser is directed to the surface under examination to remove a sample of material. An untuned, high-intensity laser is directed to a spatial region proximate to the surface. The laser has sufficient intensity to induce a high degree of nonresonant, and hence non-selective, photoionization of the sample of material within the laser beam. The non-selectively ionized sample is then subjected to mass spectral analysis to determine the nature of the unknown species.
申请公布号 SE8503901(L) 申请公布日期 1985.08.21
申请号 SE19850003901 申请日期 1985.08.21
申请人 STANFORD RES INST INT 发明人 BECKER C H;GILLEN K T;BUTTRILL JR S E
分类号 G01N23/225;H01J37/252;H01J49/40;H01L21/00;(IPC1-7):H01J49/40 主分类号 G01N23/225
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