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发明名称
무(無) 마스크 공정의 이온 주입장치와 방법
摘要
내용 없음
申请公布号
KR850005149(A)
申请公布日期
1985.08.21
申请号
KR19840008262
申请日期
1984.12.22
申请人
null, null
发明人
오까무라 시게루 (외 1)
分类号
B01J19/08;H01J37/304;H01J37/317;H01L21/265
主分类号
B01J19/08
代理机构
代理人
主权项
地址
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