| 摘要 |
PURPOSE:To detect only hydrogen selectively by adhering the thin film made of palladium, etc. to an element having piezoelectric effect. CONSTITUTION:Electrodes 2 attached with lead wires is fixed at both side surfaces of a thin plate-shaped oscillator 1 having piezoelectric effect, and the surface is covered with a vapor-deposited film 3 of palladium, etc. to constitute a hydrogen sensor 4. A detector cell 5 attached with the sensor 4 is connected to a gas supplying apparatus 7 with piping through a flowmeter 6, and the lead wires are connected to an oscillator 8. Since the resonance frequency of the sensor 4 is varied by the transmission of hydrogen contained in the gas through the palladium film, this variation is read by a frequency counter 9 and the hydrogen concn. is measured. |
